Preparation and characterization of smooth and dense silicon nitride thin films

By Xu W.   Fujimoto T.   Kojima I.  

Thin Solid Films, Vol. 394, Iss. 1, 2001-08 ,pp. : 108-113

Elsevier

Access to resources Recommend Favorite

THE CHARACTERIZATION OF CARBON NITRIDE ALLOY THIN FILMS DEPOSITED BY PULSED LASER DEPOSITION

By Rusop M.  

Molecular Crystals and Liquid Crystals Science and Technology. Section A. Molecular Crystals and Liquid Crystals, Vol. 386, Iss. 1, 2002-01 ,pp. : 89-96

Taylor & Francis Ltd

Access to resources Recommend Favorite

Characterization of carbon nitride thin films deposited by a combined RF and DC plasma beam

By Dinescu G.   Aldea E.   Musa G.   van de Sanden M.C.M.   de Graaf A.   Ghica C.   Gartner M.   Andrei A.  

Thin Solid Films, Vol. 325, Iss. 1, 1998-07 ,pp. : 123-129

Elsevier

Access to resources Recommend Favorite

Shielded arc ion plating and structural characterization of amorphous carbon nitride thin films

By Taki Y.   Kitagawa T.   Takai O.  

Thin Solid Films, Vol. 304, Iss. 1, 1997-07 ,pp. : 183-190

Elsevier

Access to resources Recommend Favorite

Synthesis and optical characterization of amorphous carbon nitride thin films by hot filament assisted RF plasma CVD

By Kundoo S.   Chattopadhyay K.K.   Banerjee A.N.   Nandy S.K.  

Vacuum, Vol. 69, Iss. 4, 2003-01 ,pp. : 495-500

Elsevier

Access to resources Recommend Favorite