Characterization of carbon nitride thin films deposited by a combined RF and DC plasma beam

Author： Dinescu G.   Aldea E.   Musa G.   van de Sanden M.C.M.   de Graaf A.   Ghica C.   Gartner M.   Andrei A.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.325, Iss.1, 1998-07, pp. : 123-129

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