Characterization of pit morphology of sputtered Al-1wt.%Si-0.5wt.%Cu alloy thin film

Author: Pyun S.-I.   Orr S.-J.   Nam S.-W.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.279, Iss.1, 1996-06, pp. : 7-10

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Abstract