Supercritical fluid chemical deposition of thin InP films. A new approach and precursors

Author： Popov V.K.   Bagratashvili V.N.   Antonov E.N.   Lemenovski D.A.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.279, Iss.1, 1996-06, pp. : 66-69

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