Yttria-stabilized zirconia thin films grown by reactive r.f. magnetron sputtering

Author： Tomaszewski H. Haemers J. Denul J. De Roo N. De Gryse R.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.287, Iss.1, 1996-10, pp. : 104-109

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