Yttria-stabilized zirconia thin films grown by reactive r.f. magnetron sputtering

Author: Tomaszewski H.   Haemers J.   Denul J.   De Roo N.   De Gryse R.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.287, Iss.1, 1996-10, pp. : 104-109

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Abstract