The interaction of dimethylethylaminealane and ammonia on clean and oxidized Al(111): Atomic layer growth of aluminum nitride

Author: Ludviksson A.   Robinson D.W.   Rogers J.W.J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.289, Iss.1, 1996-11, pp. : 6-13

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Abstract