Optical properties and structure of SiO 2 films prepared by ion-beam sputtering

Author： Tabata A.   Matsuno N.   Mizutani T.   Suzuoki Y.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.289, Iss.1, 1996-11, pp. : 84-89

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