Highly oriented Si nanoparticles in SiO 2 created by Si molecular beam epitaxy with oxygen implantation

Author: Fukatsu S.   Ishikawa Y.   Shibata N.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.294, Iss.1, 1997-02, pp. : 227-230

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Abstract