Quantification of germanium and boron in heterostructures Si/Si 1-x Ge x /Si by SIMS

Author: Prudon G.   Gautier B.   Dupuy J.C.   Dubois C.   Bonneau M.   Delmas J.   Vallard J.P.   Bremond G.   Brenier R.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.294, Iss.1, 1997-02, pp. : 54-58

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Abstract