UHV-CVD heteroepitaxial growth of Si 1-x Ge x alloys on Si(100) using silane and germane

Author: Thanh Vinh L.   Aubry-Fortuna V.   Bouchier D.   Guedj C.   Zheng Y.   Hincelin G.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.294, Iss.1, 1997-02, pp. : 59-63

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Abstract