Cold-walled UHV/CVD batch reactor for the growth of Si 1-x Ge x layers

Author: Thomsen E.V.   Christensen C.   Andersen C.R.   Pedersen E.V.   Egginton P.N.   Hansen O.   Petersen J.W.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.294, Iss.1, 1997-02, pp. : 72-75

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Abstract