Low temperature (=< 600 o C) unhydrogenated in-situ doped polysilicon thin film transistors: Towards a technology for flat panel displays

Author: Pichon L.   Raoult F.   Mourgues K.   Kis-Sion K.   Mohammed-Brahim T.   Bonnaud O.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.296, Iss.1, 1997-03, pp. : 133-136

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Abstract