Capacity coupled r.f. discharge plasma jet treatment of a-SiC:H structures

Author： Ferrari A.   Maiello G.   La Monica S.   Proverbio E.   Dinescu G.   Dinescu M.   Chitica N.   Andrei A.   Sandu V.   Gartner M.   Masini G.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.296, Iss.1, 1997-03, pp. : 23-27

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