Thermal stability and crystallization of amorphous Si 1-x B x , Si 1-x P x and Si 1-x Sb x alloy thin films

Author: Carlsson J.R.A.   Sundgren J.-E.   Madsen L.D.   Hentzell H.T.G.   Li X.-H.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.300, Iss.1, 1997-05, pp. : 51-58

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Abstract