Combined impurity gettering effects of helium-induced cavities and oxygen precipitates created by plasma immersion ion implantation

Author: Min J.   Chu P.K.   Lu X.   Iyer S.S.K.   Cheung N.W.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.300, Iss.1, 1997-05, pp. : 64-67

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Abstract