Depth-sensitive strain analysis of a W-Ta-W trilayer

Author： Malhotra S.G.   Rek Z.U.   Yalisove S.M.   Bilello J.C.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.301, Iss.1, 1997-06, pp. : 55-61

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