Structural and optical properties of amorphous hydrogenated fluorinated carbon films produced by PECVD

Author： Bica de Moraes M.A. Durrant S.F. Castro S.G.C. Galvao D.S. Bolivar-Marinez L.E.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.304, Iss.1, 1997-07, pp. : 149-156

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