Structural and optical properties of amorphous hydrogenated fluorinated carbon films produced by PECVD

Author: Bica de Moraes M.A.   Durrant S.F.   Castro S.G.C.   Galvao D.S.   Bolivar-Marinez L.E.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.304, Iss.1, 1997-07, pp. : 149-156

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