Nitrogen doping of fluorinated amorphous carbon thin films: structural and optical properties evolution upon thermal annealing

Author： Valentini L.   Braca E.   Kenny J.M.   Fedosenko G.   Engemann J.   Lozzi L.   Santucci S.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.408, Iss.1, 2002-04, pp. : 291-296

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