Nanostructure and local chemical composition of AlN-Si 3 N 4 layers grown by LPCVD

Author： Mazel A.   Marti P.   Henry F.   Armas B.   Bonnet R.   Loubradou M.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.304, Iss.1, 1997-07, pp. : 256-266

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