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Characterisation of lanthanum lithium titanate thin films deposited by radio frequency sputtering on [100]-oriented MgO substrates

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Surface- and microanalytical characterization of silicon-carbonitride thin films prepared by means of radio-frequency magnetron co-sputtering

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Nanoscaled composite TiN/Cu multilayer thin films deposited by dual ion beam sputtering: growth and structural characterisation

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Growth control and properties of microcrystallized silicon films deposited by hydrogen plasma sputtering

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