Growth of Ge layers on Si(100) monitored by in situ ellipsometry

Author: Larciprete R.   Cozzi S.   Masetti E.   Montecchi M.   Padeletti G.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.315, Iss.1, 1998-03, pp. : 49-56

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Abstract