Surface roughness of strain-relaxed Si 1-x Ge x layers grown by two-step growth method

Author: Iwano H.   Yoshikawa K.   Zaima S.   Yasuda Y.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.317, Iss.1, 1998-04, pp. : 17-20

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Abstract