Silicon based multilayer structures prepared by reactive pulsed laser deposition

Author: Ciach R.   Morgiel J.   Maziarz W.   Manoilov E.G.   Kaganovich E.B.   Svechnikov S.V.   Sheregii E.M.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.318, Iss.1, 1998-04, pp. : 154-157

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Abstract