Microcrystalline silicon thin films prepared by RF reactive magnetron sputter deposition

Author: Cerqueira M.F.   Rebouta L.   Andritschky M.   Ferreira J.A.   Da Silva M.F.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.46, Iss.12, 1995-12, pp. : 1385-1390

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Abstract