The growth of metallic multilayers on semiconductor substrates and in-situ optical monitoring: the case of Co/Cu on silicon with Pb impurity

Author: Armour P.   Emmerson C.M.   Shen T.-H.   Evans S.D.   Rainford B.D.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.318, Iss.1, 1998-04, pp. : 172-176

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Abstract