Application of focused ion beam milling to cross-sectional TEM specimen preparation of industrial materials including heterointerfaces

Author： Kuroda K.   Takahashi M.   Kato T.   Saka H.   Tsuji S.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.319, Iss.1, 1998-04, pp. : 92-96

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