Atomic hydrogen for the formation of abrupt Sb doping profiles in MBE-grown Si

Author: Thompson P.E.   Silvestre C.   Twigg M.   Jernigan G.   Simons D.S.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.321, Iss.1, 1998-05, pp. : 120-124

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Abstract