Poly(chloro-p-xylylene)/SiO 2 multilayer thin films deposited near-room temperature by thermal CVD

Author: Senkevich J.J.   Desu S.B.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.322, Iss.1, 1998-06, pp. : 148-157

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Abstract