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Elsevier

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The effects of ambient oxygen pressure on the 1.54 μm photoluminescence of Er-doped silicon-rich silicon oxide films grown by laser ablation of a Si+Er target

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Springer Publishing Company

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Poly(chloro-p-xylylene)/SiO 2 multilayer thin films deposited near-room temperature by thermal CVD

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Properties of SiO 2 and Si 3 N 4 layers deposited by MF twin magnetron sputtering using different target materials

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