Synthesis of Ge nanocrystals in thermal SiO 2 films by Ge + ion implantation

Author: Zhang J.-Y.   Bao X.-M.   Ye Y.-H.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.323, Iss.1, 1998-06, pp. : 68-71

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Abstract