On the hardness of a-C:H films prepared by methane plasma decomposition

Author: Marques F.C.   Lacerda R.G.   Odo G.Y.   Lepienski C.M.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.332, Iss.1, 1998-11, pp. : 113-117

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Abstract