Ellipsometry and Raman study on hydrogenated amorphous carbon (a-C:H) films deposited in a dual ECR-r.f. plasma

By Hong J.   Goullet A.   Turban G.  

Thin Solid Films, Vol. 352, Iss. 1, 1999-09 ,pp. : 41-48

Elsevier

Access to resources Recommend Favorite

Structure of plasma-deposited amorphous hydrogenated boron-carbon thin films

By Jacob W.   Annen A.   Sasz M.   Beckmann R.   Von Keudell A.  

Thin Solid Films, Vol. 312, Iss. 1, 1998-01 ,pp. : 147-155

Elsevier

Access to resources Recommend Favorite

Optical absorption of amorphous hydrogenated carbon thin films

By Meissner D.   Helmbold A.  

Thin Solid Films, Vol. 283, Iss. 1, 1996-09 ,pp. : 196-203

Elsevier

Access to resources Recommend Favorite

Monitoring laser-induced microstructural changes of thin film hydrogenated amorphous carbon (a-C:H) using Raman spectroscopy

By Lamberton R.W.   Morley S.M.   Maguire P.D.   McLaughlin J.A.  

Thin Solid Films, Vol. 333, Iss. 1, 1998-11 ,pp. : 114-125

Elsevier

Access to resources Recommend Favorite

Influence of the process parameters on the properties of hydrogenated amorphous carbon thin films deposited using ECR plasma

By Piazza F.   Arnal Y.   Grambole D.   Herrmann F.   Kildemo M.   Lacoste A.   Relihan G.   Golanski A.  

Thin Solid Films, Vol. 383, Iss. 1, 2001-02 ,pp. : 196-199

Elsevier

Access to resources Recommend Favorite