Effect of O 2 plasma treatment on the properties of SiO 2 aerogel film

Author: Kim H.-R.   Park H.-H.   Hyun S.-H.   Yeom G.-Y.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.332, Iss.1, 1998-11, pp. : 444-448

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Abstract