Properties of carbon nitride films deposited by magnetron sputtering

Author: Kusano Y.   Evetts J.E.   Somekh R.E.   Hutchings I.M.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.332, Iss.1, 1998-11, pp. : 56-61

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Abstract