Residual stress determination in PECVD TiN coatings by X-ray diffraction: a parametric study

Author: Thomsen N.B.   Horsewell A.   Mogensen K.S.   Eskildsen S.S.   Mathiasen C.   Bottiger J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.333, Iss.1, 1998-11, pp. : 50-59

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Abstract