Determination of residual stress in thin films: a comparative study of X-ray topography versus laser curvature method

Author： Zhao Z.B. Hershberger J. Yalisove S.M. Bilello J.C.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.415, Iss.1, 2002-08, pp. : 21-31

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