Formation and characterization of multiphase film properties of (Ti-Cr)N formed by cathodic arc deposition

Author: Nainaparampil J.J.   Zabinski J.S.   Korenyi-Both A.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.333, Iss.1, 1998-11, pp. : 88-94

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Abstract