Preparation of titanium-oxide films by solid-state reactions of titanium/silicon-oxide/silicon structures

Author: Yokota K.   Yamada T.   Miyashita F.   Hirai K.   Takano H.   Kumagai M.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.334, Iss.1, 1998-12, pp. : 109-112

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Abstract