Effect of substrate heating on elimination of pinholes in sputtering deposited SiO 2 films on LiNbO 3 single crystal substrates

Author: Nagata H.   Fujino T.   Mitsugi N.   Tamai M.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.335, Iss.1, 1998-11, pp. : 117-121

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Abstract