Composition dependence of surface morphology of ultrathin a-SiGe:H alloys studying by atomic force microscopy

Author: Xu J.   Chen K.   Feng D.   Miyazaki S.   Hirose M.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.335, Iss.1, 1998-11, pp. : 130-133

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract