Improving narrow bandgap a-SiGe:H alloys grown by hot-wire chemical vapor deposition

Author: Xu Y.   Nelson B.P.   Gedvilas L.M.   Reedy R.C.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.430, Iss.1, 2003-04, pp. : 197-201

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Abstract