RF-sputtering deposition of Al/Al 2 O 3 multilayers

Author: Paven-Thivet L.   Malibert C.   Houdy P.   Albouy P.A.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.336, Iss.1, 1998-12, pp. : 373-376

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Abstract