Study of ZrO 2 /Al 2 O 3 multilayers

Author: Gao P.   Meng L.J.   dos Santos M.P.   Teixeira V.   Andritschky M.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.64, Iss.3, 2002-01, pp. : 267-273

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Abstract