Effect of impurities on initial stages of phase formation for the system of Ti deposited on (001) Si-Ge layers

Author： Beregovsky M. Levin I. Berner A. Eizenberg M. Demuth V. Strunk H.P.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.338, Iss.1, 1999-01, pp. : 110-117

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