Raman spectroscopy study of amorphous SiGe films deposited by low pressure chemical vapor deposition and polycrystalline SiGe films obtained by solid-phase crystallization

Author： Olivares J.   Martn P.   Rodrguez A.   Sangrador J.   Jimenez J.   Rodrguez T.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.358, Iss.1, 2000-01, pp. : 56-61

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