Preparation of YBCO/ZrO 2 thin films on Si by MOCVD using a mode converting type of microwave plasma apparatus

Author： Komatsu Y.   Sato T.   Ito S.   Akashi K.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.341, Iss.1, 1999-03, pp. : 132-135

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