Synthesis of SiO 2 and SiO x C y H z thin films by microwave plasma CVD

Author: Barranco A.   Cotrino J.   Yubero F.   Espinos J.P.   Bentez J.   Clerc C.   Gonzalez-Elipe A.R.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.401, Iss.1, 2001-12, pp. : 150-158

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Abstract