Morphological properties of AlN piezoelectric thin films deposited by DC reactive magnetron sputtering

Author: Xu X.-H.   Wu H.-S.   Zhang C.-J.   Jin Z.-H.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.388, Iss.1, 2001-06, pp. : 62-67

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Abstract