Electrical properties of silicon nitride films grown on a SiGe layer by distributed electron cyclotron resonance plasma-enhanced chemical vapor deposition

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Thin Solid Films, Vol. 294, Iss. 1, 1997-02 ,pp. : 214-216

Elsevier

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Effects of gas composition and r.f. power on properties of a-C:H/SiC:H composite films grown by plasma-enhanced chemical vapor deposition

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Thin Solid Films, Vol. 326, Iss. 1, 1998-08 ,pp. : 154-159

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Growth and microhardness of SiC films by plasma-enhanced chemical vapor deposition

By Seo J.-Y.   Yoon S.-Y.   Niihara K.   Kim K.H.  

Thin Solid Films, Vol. 406, Iss. 1, 2002-03 ,pp. : 138-144

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Field emission from carbon nanotubes grown by layer-by-layer deposition method using plasma chemical vapor deposition

By Chung S.J.   Hoon S.   Jin Jang L.  

Thin Solid Films, Vol. 383, Iss. 1, 2001-02 ,pp. : 73-77

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Nozzle diameter effects on CuInSe 2 films grown by ionized cluster beam deposition

By Kondo K.   Sano H.   Sato K.  

Thin Solid Films, Vol. 326, Iss. 1, 1998-08 ,pp. : 83-87

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