Compositional variations of sputter deposited Ti/W barrier layers on substrates with pronounced surface topography

Author: Jonsson L.B.   Hedlund C.   Katardjiev I.V.   Berg S.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.348, Iss.1, 1999-07, pp. : 227-232

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Abstract